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发明名称
IMPROVED DIAMOND-LIKE CARBON FILMS AND PROCESS FOR PRODUCTION THEREOF
摘要
申请公布号
EP0238085(B1)
申请公布日期
1993.01.07
申请号
EP19870104037
申请日期
1987.03.19
申请人
THE PERKIN-ELMER CORPORATION
发明人
VENKATARAMANAN, N.;ZAROWIN, CHARLES B.
分类号
C30B29/04;C23C16/26;C23C16/27;C23C16/50
主分类号
C30B29/04
代理机构
代理人
主权项
地址
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