发明名称 A wafer basket.
摘要 <p>A wafer basket comprising: two side walls internally formed with a plurality of vertical ribs arranged at regular intervals to define grooves for reception of wafers, a front wall and a rear wall, a pair of parallel dented stay means held and extending between said front and rear walls at a location substantially lower than the lower ends of the side walls and being closer to each other than the lower ends of the side walls are such that a wafer-sized circle may be roughly inscribed to the inner surface of the side walls and the upper ends of said dented stay means, the dents of said dented stay means being formed along the upper ends thereof at the same regular intervals as the ribs of the side wall are formed so that a wafer received between certain ribs and between the corresponding dents is constrained to stand in parallel to the front and rear walls, the lower ends of the side walls, the lower portions of the front and rear walls and the dented stay means cooperating to define substantially large vacancies. &lt;IMAGE&gt;</p>
申请公布号 EP0520105(A1) 申请公布日期 1992.12.30
申请号 EP19910305897 申请日期 1991.06.28
申请人 SHIN-ETSU HANDOTAI COMPANY, LIMITED 发明人 OGINO, NOBUYOSI
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
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