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发明名称
METHOD OF FORMING T-GATE STRUCTURE ON MICROELECTRONIC DEVICE SUBSTRATE
摘要
申请公布号
IL102041(D0)
申请公布日期
1992.12.30
申请号
IL19920102041
申请日期
1992.05.28
申请人
HUGHES AIRCRAFT COMPANY
发明人
分类号
H01L21/28;H01L21/027;H01L21/285;H01L21/335;H01L21/338;H01L29/778;H01L29/812;(IPC1-7):H01L/
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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