| 摘要 |
<p>PURPOSE:To rapidly convey a material to be conveyed while effectively holding it. CONSTITUTION:A wafer holder 1 at an end of a conveying arm 2 is composed of a dielectric material, and divided electrode layers 4A 4C are buried near a surface of the material. In this case, upper parts of the layers 4A-4C of the holder 1, correspond to absorption layers 3. Terminals 41A-41C of the layers 4A-4C are exposed on a rear surface side of the holder 1, and connected to core wires of three-phase AC wirings 7. On the other hand, the atmospheric pressure in a vacuum processing chamber is monitored by an atmospheric pressure detector 81. If the atmospheric pressure falls within a vacuum discharge range, application of a voltage to the layers 4A-4C is inhibited by an interlock 9. In this case, since the voltage is always applied to any of the layers 4A-4C at the time of applying the voltage, a material to be conveyed can be effectively held.</p> |
