| 摘要 |
<p>PURPOSE:To provide a device in which a manual work is reduced, a sealing ring can be automatically simply and rapidly attached or detached with less fear of contaminating a wafer by providing special temperature adjusting plate, elevator and sealing ring guide. CONSTITUTION:A wafer sealing ring 11 made of a rubber ring and having a structure in which an opening width of an annular groove and an inner diameter of the ring can be varied due to a temperature change, is attached to or detached from a wafer 14. Such a device has a surface for mounting the ring 11, temperature adjusting means for varying the temperature of the ring 11, and an annular temperature adjusting plate 25 having a hollow part through which a wafer stage 26 can be passed. Further, the device has the stage 26 for mounting the wafer 14 mounted or non-mounted with the ring 11, an elevator 28 having a vertically moving mechanism 27 vertically moving through the hollow part of the plate 25, and a sealing ring guide 29 covering the ring 11 mounted on the plate 25 from above.</p> |
