DRY ETCHING METHOD AND DRY ETCHING DEVICE,申请号JP19910177620-传众专利搜索

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发明名称	DRY ETCHING METHOD AND DRY ETCHING DEVICE
摘要
申请公布号	JPH04373126(A)	申请公布日期	1992.12.25
申请号	JP19910177620	申请日期	1991.06.21
申请人	NEC CORP	发明人	TAKADO NOBUKAZU
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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