PROCESS FOR BONDING FLUORORESIN FILM

摘要

PURPOSE:To bond a fluororesin film firmly to a substrate by treating the surface of the film with a plurality of specified reagents and fusing this film to the substrate. CONSTITUTION:A process for bonding a fluororesin film (e.g. fluorinated ethylene/propylene copolymer film) to a substrate (e.g. silicon wafer) comprising treating the surface of the film with a reagent containing metallic sodium (e.g. Chemgrip, a product of Norton Co.) and then with a silane coupling agent (e.g. gamma-aminopropyltriethoxysilane) and fusing the treated film to the substrate.