POLISHING METHOD OF SUBSTRATE,申请号JP19910177174-传众专利搜索

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发明名称	POLISHING METHOD OF SUBSTRATE
摘要
申请公布号	JPH04373128(A)	申请公布日期	1992.12.25
申请号	JP19910177174	申请日期	1991.06.21
申请人	SONY CORP	发明人	SHIMANOE MUNEHARU;SATO HIROSHI;NIEDA AKIRA
分类号	B24B1/04;H01L21/304	主分类号	B24B1/04
代理机构		代理人
主权项
地址

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