HIGH TRANSMITTING PELLICLE

摘要

PURPOSE:To provide a pellicle excellent in transmittance of light by forming an antireflection layer without color speckles from polymers having small refractive index and excellent filtering property for a soln. CONSTITUTION:A low refractive index antireflection film is formed on at least one surface of a transparent thin film. This film consists of a fluorine-contg. polymer having cyclic structure in the main chain and showing <=1.0dl/g reduction viscosity against 1.5g/dl density perfluorotributylamine at 23 deg.C. Thereby, the obtd. pellicle has excellent transmitting property for light and no color speckle.