PRODUCTION OF PIEZOELECTRIC AND FERROELECTRIC THIN FILM,申请号JP19910146193-传众专利搜索

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发明名称	PRODUCTION OF PIEZOELECTRIC AND FERROELECTRIC THIN FILM
摘要
申请公布号	JPH04371568(A)	申请公布日期	1992.12.24
申请号	JP19910146193	申请日期	1991.06.18
申请人	SEIKO EPSON CORP	发明人	HASEGAWA KAZUMASA
分类号	C23C14/08;C23C14/34;C23C14/58;H01L41/18	主分类号	C23C14/08
代理机构		代理人
主权项
地址

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