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发明名称
EVALUATION OF SEMICONDUCTOR CRYSTAL DISLOCATION
摘要
申请公布号
JPH04370948(A)
申请公布日期
1992.12.24
申请号
JP19910174517
申请日期
1991.06.19
申请人
NEC CORP
发明人
KAWANO MASAYA
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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