MINIATUR-BETAETIGUNGSELEMENT

摘要

A miniature actuating device (1), is disclosed, with a carrier (13), a diaphragm (11), a hollow space (15) being formed between the carrier (13) and the diaphragm (11) and an insulating layer (12) being arranged between them, and with two electrode terminals (16, 17) for producing an electrostatic field between the diaphragm and the carrier for an activated state. With an actuating device of this kind, it is desired that the throw that can be achieved under the influence of the electrostatic field be rendered as large as possible. To that end, the hollow space is present only in the state of rest and in the activated state virtually disappears.