DEVICE FOR TESTING OF DEGRADATION OF MIS-STRUCTURES,申请号SU19904888586-传众专利搜索

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发明名称	DEVICE FOR TESTING OF DEGRADATION OF MIS-STRUCTURES
摘要
申请公布号	RU1783454(C)	申请公布日期	1992.12.23
申请号	SU19904888586	申请日期	1990.12.05
申请人	PENZENSKIJ POLT INSTITUT	发明人	BALTYANSKIJ SEMA SH,SU;ZVEREVA VALERIYA V,SU;KARPANIN OLEG V,SU;LIKHATSKIJ LEONID G,SU;METALNIKOV ALEKSEJ M,SU;CHERNETSOV KONSTANTIN N,SU;SHUBIN VYACHESLAV S,SU
分类号	H01L21/66;G01R31/26	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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