Feed system.

摘要

Herein disclosed is a feed system which comprises: a moving body (28);a plurality of sets of support blocks (21-26) arranged at the two sides of the moving body (28) and along the moving direction of the moving body (28); a plurality of clamping members (21a-26a) supported through elastically deformable members (27) by the respective sets of the support blocks (21-26) to engage with the sides of the moving body (28); clamping actuators (29-34) mounted on the individual sets of the support blocks (21-26) for displacing the clamping members (21a-26a) toward the sides of the moving body (28) to clamp the moving body (28); moving actuators (35-49) mounted on the individual sets of the support blocks (21-26) for displacing the clamping members (21a-26a) in the moving direction of the movable member (28); and control means (47-49) for operating the clamping actuators (29-34) and the moving actuators (35-49) with phases offset from each other.