发明名称 Method of manufacturing of an optical structure and optical structure thus obtained.
摘要 <p>The invention relates to the manufacture of an optical structure. On a polymeric substrate 41, are carried out first a surface activation at 42, and the deposition of a 2000 ANGSTROM thick SiO2 layer 43, then the deposition of a plurality of functional layers 44, 44', 44'', and finally a 3 micron thick SiO2 deposition 45 followed by a 3 micron thick Si3N4/SiOxNy deposition (46), the latter under conditions of radio frequency polarisation. The optical structure thus produced has qualities of adherence, of abrasion resistance and of resistance to thermal shocks. &lt;IMAGE&gt;</p>
申请公布号 EP0519784(A1) 申请公布日期 1992.12.23
申请号 EP19920401596 申请日期 1992.06.10
申请人 L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE 发明人 ROSTAING, JEAN-CHRISTOPHE;COEURET, FRANCOIS
分类号 C23C16/40;G02B1/10 主分类号 C23C16/40
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