发明名称 |
Gas flow type angular velocity sensor. |
摘要 |
<p>A gas flow type angular velocity sensor comprising two semiconductor substrates (1,2) whereon a gas path and a pair of heat wires (51,52) are formed by micromachining is so constructed that its body of high strength may be readily manufactured and easily assembled. The above-mentioned object is achieved in such a way that the first semiconductor substrate (2) with an etched thereon groove (40) constituting a gas path (4) and the second semiconductor substrate (1) with a formed thereon paired heat wires (51,52) are coupled and bonded with each other to form the sensor body. <IMAGE></p> |
申请公布号 |
EP0519404(A1) |
申请公布日期 |
1992.12.23 |
申请号 |
EP19920110159 |
申请日期 |
1992.06.16 |
申请人 |
HONDA GIKEN KOGYO KABUSHIKI KAISHA |
发明人 |
HOSOI, TAKASHI;DOI, MIZUHO;NISHIO, TOMOYUKI;HIYAMA, SATOSHI |
分类号 |
G01C19/00 |
主分类号 |
G01C19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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