发明名称 APPARATUS FOR THE PRODUCTION OF A REGULAR MICROWAVE FIELD
摘要 The invention relates to an apparatus for the production of a regular microwave field over a comparatively great area. This apparatus has a cavity resonator into which microwaves are put. Electromagnetic energy is coupled by special couplers, inductively or capacitively, out of the standing waves forming in the cavity resonator into a chamber in which preferably a plasma is contained.
申请公布号 US5173640(A) 申请公布日期 1992.12.22
申请号 US19910792409 申请日期 1991.11.15
申请人 LEYBOLD AKTIENGESELLSCHAFT 发明人 GEISLER, MICHAEL;JUNG, MICHAEL;KESSLER, BERNHARD
分类号 B01J19/12;H01J37/32;H01P5/08;H01P7/06 主分类号 B01J19/12
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