发明名称 |
APPARATUS FOR THE PRODUCTION OF A REGULAR MICROWAVE FIELD |
摘要 |
The invention relates to an apparatus for the production of a regular microwave field over a comparatively great area. This apparatus has a cavity resonator into which microwaves are put. Electromagnetic energy is coupled by special couplers, inductively or capacitively, out of the standing waves forming in the cavity resonator into a chamber in which preferably a plasma is contained.
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申请公布号 |
US5173640(A) |
申请公布日期 |
1992.12.22 |
申请号 |
US19910792409 |
申请日期 |
1991.11.15 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
GEISLER, MICHAEL;JUNG, MICHAEL;KESSLER, BERNHARD |
分类号 |
B01J19/12;H01J37/32;H01P5/08;H01P7/06 |
主分类号 |
B01J19/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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