| 摘要 |
PURPOSE:To reduce loss of electrons generated by preliminary ionization and to perform a sufficient preliminary ionization in a laser discharge circuit of a discharge-excitation type laser using a UV preliminary ionization by corona discharge. CONSTITUTION:In a laser discharge circuit of a discharge-excitation type laser using preliminary ionization by discharging through a dielectric 13 layer, a delay element R for controlling a charge starting time of the dielectric 13 layer provided on an auxiliary electrode 12 for the ionization is connected in series with the dielectric layer thereby to perform the ionization at a time near a main discharge. Thus, a loss of the ionization electrons is reduced, and the peak value of the ionized current is raised. |
