| 摘要 |
PURPOSE:To reduce consumption of a preliminary ionization electrode and to suppress a discharge chemical reaction in a laser discharge circuit of a discharge-excitation type laser using a UV preliminary ionization. CONSTITUTION:A preliminary ionization capacitor Cp' and a main discharge capacitor Cp are separated, a delay element R for controlling a charge starting time of the capacitor Cp' is provided in parallel with the capacitor Cp, preliminary ionization is performed at a time the start of the main discharge, and loss of preliminary ionized electrons is reduced. |
