发明名称 ANGLE MEASURING DEVICE WITH CORRECTION GRID
摘要 An interference type angle measuring device has a graduated disk with a circular graduation. This circular graduation is scanned by a scanning device, which is constructed as a monolithically integrated optical circuit with two diametrical scanning areas. Simply structured coupling and decoupling grids are used as coupling elements, which have also simply constructed correction grids placed upstream or downstream thereof.
申请公布号 US5173601(A) 申请公布日期 1992.12.22
申请号 US19910691533 申请日期 1991.04.25
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 FRANZ, ANDREAS
分类号 G01B11/26;G01D5/38 主分类号 G01B11/26
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