发明名称 MANUFACTURE OF BLASS CERAMIC MULTILAYER CIRCUIT BOARD
摘要 PURPOSE:To provide a method of manufacturing a glass-ceramic multilayer circuit board where a pore-free good via can be formed even if the via is as small in diameter as 100mum or so. CONSTITUTION:Mixed powder of copper powder compounded with ceramic powder is filled into a through-hole provided to a glass-ceramic green sheet at a via forming predetermined position, and then conductor paste is printed on the green sheet for the formation of a conductor pattern. A laminate composed of the laminated green sheets is heated to remove binder and temporarily burned, the obtained temporarily burned body is burned again, and the grain diameter of copper powder and ceramic powder are so set in grain diameter as to make the filling density of the mixed powder of copper powder and ceramic powder filled into the through-hole equal to or higher than the density of the glass-ceramic green sheet.
申请公布号 JPH04369899(A) 申请公布日期 1992.12.22
申请号 JP19910146136 申请日期 1991.06.18
申请人 FUJITSU LTD 发明人 SUZUKI HITOSHI;YAMAGISHI WATARU;NIWA KOICHI;HASHIMOTO KAORU;KAMEHARA NOBUO
分类号 H01L23/15;H01L21/48;H05K1/03;H05K1/09;H05K3/40;H05K3/46 主分类号 H01L23/15
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