| 摘要 |
PURPOSE:To improve resolution without deteriorating heat resistance by allowing to contain a solvent essentially consisting of a quinonediazide compound, an alkali soluble resin and a trialkyl ortho-formate. CONSTITUTION:A trialkyl ortho-formate shown in formula I is used as a solvent. In this case, R is alkyl group having carbon number of 1-5 which may be substituted. Moreover, the positive resist composition is allowed to contain solvent essentially consisting of quinonediazide compound, alkali soluble resin and trialkyl ortho-formate. Alkyl group in which R may be substituted may be branched, and a hydroxyl group, halogen atom, such as chlorine atom, etc., as a substituent for alkyl group is preferable. |
