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发明名称
POSITION DETECTING METHOD AND POSITION DETECTING DEVICE USING DIFFRACTION GRATING
摘要
申请公布号
JPH04366704(A)
申请公布日期
1992.12.18
申请号
JP19910169158
申请日期
1991.06.14
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
UNE ATSUNOBU;SUZUKI MASANORI
分类号
G01B11/00;G01B11/14
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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