,申请号JP19860115538-传众专利搜索

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发明名称
摘要
申请公布号	JPH0480547(B2)	申请公布日期	1992.12.18
申请号	JP19860115538	申请日期	1986.05.19
申请人	FUJITSU LTD	发明人	MAEKAWA TOORU;TAKIGAWA HIROSHI;UEDA TOMOSHI;GOTO JUNJIRO
分类号	G01J5/20;H01L31/00;H01L31/02;H01L31/09	主分类号	G01J5/20
代理机构		代理人
主权项
地址

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