| 摘要 |
PURPOSE:To improve strength and reliability by forming a mixture of a rare earth oxide with SiC at a specific weight ratio, rapidly heating the formed mixture to a specific temperature, holding the formed mixture at the temperature for a prescribed time and synthesizing the subject sintered compact. CONSTITUTION:With 95-5wt.% rare earth oxide powder such as Y2O3, is mixed 5-95wt.% Al2O3 powder. The resultant mixed oxide powder in an amount of 80-10wt.% is then mixed with 20-90wt.% SiC powder and the obtained mixture is added and mixed with an aqueous solution of a polymer such as PVA at 2-30wt.% concentration. The prepared mixture is subsequently dried and formed. The formed compact is then rapidly heated to 1700-2100 deg.C in a nonoxidizing atmosphere such as Ar gas and kept at the aforementioned temperature for 0.1-30min to provide an SiC-based oxide sintered compact. The resultant sintered compact is further subjected to hot isostatic pressing treatment at 1600-2000 deg.C under 0.2-10 MPa in a nonoxidizing atmosphere. Thereby, the objective SiC-based oxide sintered compact free of fine defects is obtained. |
