,申请号JP19860106487-传众专利搜索

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发明名称
摘要
申请公布号	JPH0479932(B2)	申请公布日期	1992.12.17
申请号	JP19860106487	申请日期	1986.05.09
申请人	TOKYO ELECTRON LTD	发明人	YANAGI YOSHIAKI
分类号	B65G54/02;B25B11/00;H01L21/677;H01L21/683;H02K33/18;H02N13/00	主分类号	B65G54/02
代理机构		代理人
主权项
地址

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