METHOD AND APPARATUS FOR METAL ORGANIC CHEMICAL VAPOR DEPOSITION,申请号JP19910140180-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR METAL ORGANIC CHEMICAL VAPOR DEPOSITION
摘要
申请公布号	JPH04364720(A)	申请公布日期	1992.12.17
申请号	JP19910140180	申请日期	1991.06.12
申请人	NIPPONDENSO CO LTD	发明人	KAWAI JUN
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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