APPARATUS FOR CHAMFERING WAFER NOTCH

摘要

PURPOSE:To enable chamfering work easily and surely to a notch, to achieve chamfering work to this notch, and to simplify a constitution. CONSTITUTION:The following are provided: a rotary disc-shaped grindstone 16; a wafer-holding mechanism 14 that holds a wafer 12; a first drive mechanism 15 rotated over a predetermined range of angles around its center axis (in the arrow theta direction); and a second drive mechanism 20 that advances and retreats the wafer 12 in the arrow X direction; and a third drive mechanism 22 that advances and retreats the grindstone 16 in the Z direction. This grindstone 16 has a substrate 52 made of an elastic material and a plurality of grind grains 54 buried in the peripheral face of the substrate 52.