APPARATUS FOR CHAMFERING WAFER NOTCH

摘要

PURPOSE:To enable chamfering work easily and surely to a notch, to achieve chamfering work to this notch, and to simplify a constitution. CONSTITUTION:The following are provided: a rotary disc-shaped grindstone 16; a wafer-holding mechanism 14 that holds a wafer 12 so that its face may cross the face of the grindstone 16; a first drive mechanism 15 rotatable over a predetermined range of angles around its center axis (in the arrow theta direction); and a second drive mechanism 20 that moves the wafer 12 in the arrow X direction. Further provided are a third drive mechanism 22 that moves the grindstone 16 in the Z direction and a copying mechanism 26 that relatively guides a notch 24 of the wafer 12 and the grindstone 16.