VERTICAL TYPE SEMICONDUCTOR MANUFACTURING APPARATUS,申请号JP19910141783-传众专利搜索

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发明名称	VERTICAL TYPE SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号	JPH04365321(A)	申请公布日期	1992.12.17
申请号	JP19910141783	申请日期	1991.06.13
申请人	MITSUBISHI ELECTRIC CORP	发明人	SHIMA YUKIO;TAKAHARA SHOJI
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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