ELEMENT STRUCTURE FOR MONITOR APPARATUS IN SEMICONDUCTOR CHIP,申请号JP19910141786-传众专利搜索

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发明名称	ELEMENT STRUCTURE FOR MONITOR APPARATUS IN SEMICONDUCTOR CHIP
摘要
申请公布号	JPH04365347(A)	申请公布日期	1992.12.17
申请号	JP19910141786	申请日期	1991.06.13
申请人	MITSUBISHI ELECTRIC CORP	发明人	HIRAI MASAKAZU
分类号	G01R31/26;H01L21/66;H01L21/822;H01L27/04	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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