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发明名称
FLATTENING OF INTER-LAYER INSULATING FILM
摘要
申请公布号
JPH04364040(A)
申请公布日期
1992.12.16
申请号
JP19910138101
申请日期
1991.06.11
申请人
NEC CORP
发明人
NAMITA HIROMITSU
分类号
H01L21/306;H01L21/263;H01L21/316;H01L21/3205
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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