Mask and charged particle beam exposure method using the mask.

摘要

A transmission mask is used when exposing patterns by a charged particle beam (B1) which passes therethrough. The transmission mask includes a plate, and a plurality of rectangular blocks (4b, 4i) formed on a surface of the plate and having an area approximately equal to a cross sectional area of the charged particle beam irradiated thereon, where the blocks include a first block (4b) in which at least one transmission hole (11) is provided and a second block (4i) in which no transmission hole is provided. The transmission hole (11) of the first block (4b) is partly irradiated by the charged particle beam (B1) when varying the size of the exposing pattern. A single second block (4i) is provided immediately adjacent to at least two first blocks (4b), so that an irradiating position of the charged particle beam can be varied with respect to both the two first blocks from the single second block. <IMAGE>