ION BEAM PROCESSING DEVICE,申请号JP19910037888-传众专利搜索

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发明名称	ION BEAM PROCESSING DEVICE
摘要
申请公布号	JPH04363852(A)	申请公布日期	1992.12.16
申请号	JP19910037888	申请日期	1991.02.08
申请人	ELIONIX KK	发明人	ONO SUSUMU
分类号	G01B15/04;H01J37/28;H01J37/305;H01L21/302	主分类号	G01B15/04
代理机构		代理人
主权项
地址

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