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发明名称
ION BEAM MACHINING DEVICE
摘要
申请公布号
JPH04363851(A)
申请公布日期
1992.12.16
申请号
JP19910037887
申请日期
1991.02.08
申请人
ELIONIX KK
发明人
MIYAMOTO IWAO;ONO SUSUMU;OKAZAKI HISASHI;SHINOZUKA AKIYA
分类号
H01J37/04;H01J37/20;H01J37/305
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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