| 摘要 |
PURPOSE:To obtain a measuring apparatus of soft X-ray intensity distribution which measures reliably the two-dimensional intensity distribution of a soft X-ray of high intensity. CONSTITUTION:A light-intercepting plate 25 having a pinhole 26 for lowering the intensity by restricting a soft X-ray and an intensity detector 23 detecting the intensity of the soft X-ray passing through the pinhole 26 of the light- intercepting plate 25 are provided on a horizontal stage 17 which is driven in the direction perpendicular to the direction of advance of the soft X-ray. The horizontal stage 17 is driven in the vertical direction through the intermediary of a vertical-motion stage 13. Thereby the light-intercepting plate 25 can make its pinhole 26 scan in the two-dimensional direction of the section of the soft X-ray, and therefore the two-dimensional intensity distribution in the section can be measured.
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