| 摘要 |
<p>PURPOSE:To prevent a shade provided on a holder for preventing a semiconductor substrate from falling forward when a table is set up for uprighting the substrates in an ion implantation chamber from shutting out ion and thereby causing defective chips which ion is not implanted into. CONSTITUTION:A flat surface is made in a stopper to be provided on a table in a load-lock chamber formed in the upper part of an ion implantation chamber so as to adhere closely an orientation flat part of a substrate to. Cylindrical holders 7 having no shade are provided on the lower end of the table in the ion implantation chamber for catching the orientation flat part and a holder 5 having a shade is provided on each side above the holders 7. By allowing a scrap part of the substrate from which no chip is made to draw near to the holders 5 having a shade, defective chips caused by the shade of the holder are reduced and thereby the non-defective rate increases.</p> |
