发明名称 |
Vacuum processing apparatus and transportation system thereof |
摘要 |
A vacuum processing apparatus comprises a carrying body for holding a glass plate thereon, a pair of elongated stationary members extended in a vacuum chamber in which processing stages for forming films on the glass plate by a vapor deposition method are provided, a linear motor transportation device provided at one of the stationary members, and a pair of movable members provided at both sides of the carrying body so that the movable members are moved along the stationary members in a non-contacting state by the action of the linear motor device.
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申请公布号 |
US5170714(A) |
申请公布日期 |
1992.12.15 |
申请号 |
US19910795999 |
申请日期 |
1991.11.22 |
申请人 |
ASAHI GLASS COMPANY, LTD. |
发明人 |
KATAGIRI, YOSHITAKA |
分类号 |
B29C51/26;B65G54/02;F16C29/00;H01L21/677 |
主分类号 |
B29C51/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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