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发明名称
THIN FILM FORMING METHOD AND SPUTTERING SYSTEM
摘要
申请公布号
JPH04362174(A)
申请公布日期
1992.12.15
申请号
JP19910160956
申请日期
1991.06.05
申请人
NEC CORP
发明人
HASEGAWA TOSHIYUKI
分类号
C23C14/35;C23C14/54
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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