| 摘要 |
PURPOSE:To produce the homogeneous high-purity thin film having <=1mum thickness on a base plate by using a highly stable coating soln. from which the solvent is easily removed. CONSTITUTION:The soln. of a barium salt or a barium alkoxide in a carboxylic acid or in the mixture of a carboxylic acid and an alcohol and the soln. of a titanium alkoxide in a carboxylic acid or in an alcohol contg. a carboxylic acid are mixed so that the molar ratio of Ba to Ti is conrolled to 1:1. The mixture is uniformly mixed with a hydrolysis inhibitor such as alcoholamines, glycols and beta-diketones while being heated and refluxed, water is added to adjust its viscosity, and a coating soln. is prepared. The soln. is applied on the surface of a heat-resistant base plate to form a coating film, the coated base plate is dried and heat-treated to form a precursor for barium titanate, and the precursor is baked to obtain a barium titanate thin film. |
