SEMICONDUCTOR WAFER TRANSFER DEVICE

摘要

PURPOSE:To quickly and accurately transfer semiconductor wafers to prescribed housing places in a carrier without raising dust in a semiconductor wafer transfer device which transfers semiconductor wafers between carries. CONSTITUTION:Wafer holders 5a and 5b are provided at an internal L whose value is equal to the least common multiple of the storing intervals of carries 16 and 17. A control 14 which controls the wafer holders 5a and 5b corresponding to the arrangement of semiconductor wafers 15 is provided.