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发明名称
PRODUCTION OF IRON NITRIDE MAGNETIC THIN FILM
摘要
申请公布号
JPH04362170(A)
申请公布日期
1992.12.15
申请号
JP19910163796
申请日期
1991.06.07
申请人
RICOH CO LTD
发明人
OSHITA MIKIO;OTA WASABURO
分类号
C23C14/06;C23C14/32;C23C14/58
主分类号
C23C14/06
代理机构
代理人
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