发明名称 |
PHOTOSENSITIVE COMPOSITION |
摘要 |
Photosensitive compositions comprising a polymer and a photoactive constituent, which are able to be developed with aqueous, alkaline agents exhibit good bleaching properties in the DUV range, whereby the photoactive constituent has good solubility-inhibiting properties and does not evaporate during the drying process, when the photoactive constituent comprises diazo tetronic acid or a diazo tetronic acid derivative of the following structure: <IMAGE> where the residues R are the same or different and signify H, alkyl, cycloalkyl, aryl or a silicon-containing residue.
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申请公布号 |
US5171656(A) |
申请公布日期 |
1992.12.15 |
申请号 |
US19900556014 |
申请日期 |
1990.07.20 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
SEBALD, MICHAEL;BECK, JUERGEN;LEUSCHNER, RAINER;SEZI, RECAI;BESTMANN, HANS J. |
分类号 |
G03F7/039;G03F7/016;G03F7/075;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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