发明名称 PHOTOSENSITIVE COMPOSITION
摘要 Photosensitive compositions comprising a polymer and a photoactive constituent, which are able to be developed with aqueous, alkaline agents exhibit good bleaching properties in the DUV range, whereby the photoactive constituent has good solubility-inhibiting properties and does not evaporate during the drying process, when the photoactive constituent comprises diazo tetronic acid or a diazo tetronic acid derivative of the following structure: <IMAGE> where the residues R are the same or different and signify H, alkyl, cycloalkyl, aryl or a silicon-containing residue.
申请公布号 US5171656(A) 申请公布日期 1992.12.15
申请号 US19900556014 申请日期 1990.07.20
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 SEBALD, MICHAEL;BECK, JUERGEN;LEUSCHNER, RAINER;SEZI, RECAI;BESTMANN, HANS J.
分类号 G03F7/039;G03F7/016;G03F7/075;H01L21/027 主分类号 G03F7/039
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