| 摘要 |
<p>PURPOSE:To improve the lot yield by prolonging the treating time of a cleaning device to remove impurity such as dust, for example, from the lot when the progress of the lot is faster then scheduled. CONSTITUTION:This device is provided with a treatment planning preparing means 10 to prepare the treatment planning of a certain product, a treating means 20 to successively treat the products by the devices of respective processes based on the product treatment planning prepared by the treatment planning preparing means 10, a treatment progress managing means 30 to manage the progress condition of the treatment of the product in the devices of the respective processes, a treatment progress evaluating means 40 to evaluate difference between the product treatment planning prepared by the treatment planning preparing means 10 and the product treatment progress managed by the treatment progress managing means 30, and a treating time changing means 50 to change the treating time of the product at the device of each process based on a product treatment progress result evaluated by the treatment progress evaluating means 40.</p> |
