发明名称 POLISHING DEVICE
摘要 PURPOSE:To suppress the deflection of an upper surface table and in its turn the generation of its machining face distortion by suspending the upper surface table by plural wire materials with one ends thereof connected in the distributed state to the upper face of the upper surface table. CONSTITUTION:One ends of plural steel wires 14 are fitted in the distributed state to the upper face of an upper surface table 1. The other ends of these steel wires 14 are drawn in the converged state, and a free joint 10 for allowing the rotation of the upper surface table 1 is directly or indirectly connected to the upper end of the other ends of the steel wires 14. This results in suppressing the deflection of the upper surface table 1, and in its turn, the generation of its machining face distortion. In addition, the upper surface table 1 itself is made lightweight, and its suspension system can be suppressed to very light weight.
申请公布号 JPH04360764(A) 申请公布日期 1992.12.14
申请号 JP19910132686 申请日期 1991.06.04
申请人 SHOWA ALUM CORP 发明人 YAMAMOTO TERUMI
分类号 B24B37/12;G11B5/84 主分类号 B24B37/12
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