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发明名称
PATTERN LAYOUT INSPECTING DEVICE
摘要
申请公布号
JPH04360273(A)
申请公布日期
1992.12.14
申请号
JP19910136092
申请日期
1991.06.07
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWAI TAKAHIRO
分类号
H01L21/82;G06F17/50
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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