| 摘要 |
<p>PURPOSE:To prevent the discharge of untreated gas to the outside as it is at the time of replacing a gas suction cylinder by connecting a first and a second gas suction cylinders connected together in parallel and in series by piping and installing valves to switch over parallel to series or vice versa. CONSTITUTION:A first and a second gas suction cylinders 1 and 2 are connected together in parallel and in series by pipings 3-10 and valves 3a-6a, 11a and 12a are installed to switch over parallel to series or vice versa. As a result, no untreated gas is discharged as it is to the outside at the time of replacing the gas suction cylinder.</p> |
