| 摘要 |
PURPOSE:To inspect a surface of a crystal and a treatment effect of the inside layer at a time, by cleaving a crystal so that a first cleavage plane crosses a secondary cleavage plane for preparing a wedge-shaped crystal, fixing the wedge-shaped crystal with a reinforcing ring, and providing a surface treatment thereon in a given solution or in a given vapor phase. CONSTITUTION:Crystalline estimation and component analysis are carried out by directing an electron beam 15 over the surface of a sample after a surface treatment is performed in a given solution or in a given vapor phase. In this case, the sample is cleaved so that a first cleavage plane 10 crosses a secondary cleavage plane 11 and a wedge-shaped crystal is prepared. Then, the wedge- shaped crystal is fixed with a reinforcing ring 12 in the specific position and then a surface treatment is carried out in a given solution or in a given vapor phase. In addition to this way, after the surface treatment is carried out in a given solution or in a vapor phase, the sample is cleaved so that a first cleavage plane 10 crosses a secondary cleavage plane 11 and a wedge-shaped crystal is prepared. Then, the crystallinity estimation and component analysis can be carried out by irradiating an electron beam 15. |
