| 摘要 |
PURPOSE:To offer the mask which can form a minute pattern, and also, is excellent in durability against a laser light of high intensity, and an excimer laser ablation working method executed by using its mask, with regard to the laser ablation working method and the mask used for laser ablation working. CONSTITUTION:This method is constituted so that laser ablation working is executed by light which transmits through an area in which a dielectric mirror 5 of a dielectric mirror mask 6 does not exist, by using the dielectric mirror mask 6 in which the dielectric mirror 5 is formed selectively on a base plate 1, or laser ablation working is executed by a reflected light from the dielectric mirror 5 of the dielectric mirror mask 6. |
