发明名称 CONTROLLING METHOD OF DEVICE FOR COATING INSIDE OF TUBE
摘要 PURPOSE:To control to reduce elongation of a filament by making the descending speed of a bottom electrode and filament temperature freely controllable, and making the descending speed greater than the speed of thermal expansion of the filament. CONSTITUTION:In a tube inside coating unit that applies tension to a filament 4 inserted in a tube 2 by an electrode 6 provided below the filament and, at the same time, raise the temperature to the evaporation temperature by heating electrically, a balancing weight 12 is installed to the electrode 6 through a rope 11. Further, a driving device 13 is installed to the balancing weight 12 through a rope 14. The descending speed of the electrode 6 is controlled by the balancing weight 12 and the driving device 13. When the speed of temperature rise of the filament 4 is fast, the speed of thermal expansion exceeds the descending speed of the electrode 6 and the filament 4 becomes loose in the tube 4. Then, the temperature of the filament 4 and the descending speed of the electrode 6 are controlled by a control unit 18 basing on detected values from a filament temperature detector 19 and a descending speed detector 20.
申请公布号 JPS5675569(A) 申请公布日期 1981.06.22
申请号 JP19790152029 申请日期 1979.11.26
申请人 ULVAC CORP 发明人 TOKU AKIHIKO
分类号 C23C14/24;C23C14/26;C23C14/54 主分类号 C23C14/24
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